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Hybrid system integration inside an SEM. ( a ) A hybrid AFM/SEM system based on laser beam deflection by DME-SPM. ( b ) AttoAFM/SEM system with a fiber-optic <t>configuration</t> by Attocube Systems AG. ( c ) A hybrid AFM/SEM system using self-sensing piezoresistive cantilevers. Adapted from Ref. . ( d ) An AFM system in dynamic mode for SEM integration by Trioptics. ( e ) 3TB4000 AFM/FIB/SEM system from Nanonics Imaging Ltd. ( f ) A hybrid AFM/FIB/SEM system. Adapted from Ref. . ( g ) A hybrid SEM and TEM manipulation system. Reprinted with permission from Ref. . AFM, atomic force microscope; FIB, focused ion beam; TEM, transmission electron microscope.
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Hybrid system integration inside an SEM. ( a ) A hybrid AFM/SEM system based on laser beam deflection by DME-SPM. ( b ) AttoAFM/SEM system with a fiber-optic <t>configuration</t> by Attocube Systems AG. ( c ) A hybrid AFM/SEM system using self-sensing piezoresistive cantilevers. Adapted from Ref. . ( d ) An AFM system in dynamic mode for SEM integration by Trioptics. ( e ) 3TB4000 AFM/FIB/SEM system from Nanonics Imaging Ltd. ( f ) A hybrid AFM/FIB/SEM system. Adapted from Ref. . ( g ) A hybrid SEM and TEM manipulation system. Reprinted with permission from Ref. . AFM, atomic force microscope; FIB, focused ion beam; TEM, transmission electron microscope.
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Hybrid system integration inside an SEM. ( a ) A hybrid AFM/SEM system based on laser beam deflection by DME-SPM. ( b ) AttoAFM/SEM system with a fiber-optic <t>configuration</t> by Attocube Systems AG. ( c ) A hybrid AFM/SEM system using self-sensing piezoresistive cantilevers. Adapted from Ref. . ( d ) An AFM system in dynamic mode for SEM integration by Trioptics. ( e ) 3TB4000 AFM/FIB/SEM system from Nanonics Imaging Ltd. ( f ) A hybrid AFM/FIB/SEM system. Adapted from Ref. . ( g ) A hybrid SEM and TEM manipulation system. Reprinted with permission from Ref. . AFM, atomic force microscope; FIB, focused ion beam; TEM, transmission electron microscope.
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mri compatible fiber optic response four-button diamond configuration pad  (Current Designs Inc)
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Hybrid system integration inside an SEM. ( a ) A hybrid AFM/SEM system based on laser beam deflection by DME-SPM. ( b ) AttoAFM/SEM system with a fiber-optic <t>configuration</t> by Attocube Systems AG. ( c ) A hybrid AFM/SEM system using self-sensing piezoresistive cantilevers. Adapted from Ref. . ( d ) An AFM system in dynamic mode for SEM integration by Trioptics. ( e ) 3TB4000 AFM/FIB/SEM system from Nanonics Imaging Ltd. ( f ) A hybrid AFM/FIB/SEM system. Adapted from Ref. . ( g ) A hybrid SEM and TEM manipulation system. Reprinted with permission from Ref. . AFM, atomic force microscope; FIB, focused ion beam; TEM, transmission electron microscope.
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Hybrid system integration inside an SEM. ( a ) A hybrid AFM/SEM system based on laser beam deflection by DME-SPM. ( b ) AttoAFM/SEM system with a fiber-optic configuration by Attocube Systems AG. ( c ) A hybrid AFM/SEM system using self-sensing piezoresistive cantilevers. Adapted from Ref. . ( d ) An AFM system in dynamic mode for SEM integration by Trioptics. ( e ) 3TB4000 AFM/FIB/SEM system from Nanonics Imaging Ltd. ( f ) A hybrid AFM/FIB/SEM system. Adapted from Ref. . ( g ) A hybrid SEM and TEM manipulation system. Reprinted with permission from Ref. . AFM, atomic force microscope; FIB, focused ion beam; TEM, transmission electron microscope.

Journal: Microsystems & Nanoengineering

Article Title: Recent advances in nanorobotic manipulation inside scanning electron microscopes

doi: 10.1038/micronano.2016.24

Figure Lengend Snippet: Hybrid system integration inside an SEM. ( a ) A hybrid AFM/SEM system based on laser beam deflection by DME-SPM. ( b ) AttoAFM/SEM system with a fiber-optic configuration by Attocube Systems AG. ( c ) A hybrid AFM/SEM system using self-sensing piezoresistive cantilevers. Adapted from Ref. . ( d ) An AFM system in dynamic mode for SEM integration by Trioptics. ( e ) 3TB4000 AFM/FIB/SEM system from Nanonics Imaging Ltd. ( f ) A hybrid AFM/FIB/SEM system. Adapted from Ref. . ( g ) A hybrid SEM and TEM manipulation system. Reprinted with permission from Ref. . AFM, atomic force microscope; FIB, focused ion beam; TEM, transmission electron microscope.

Article Snippet: Attocube Systems AG uses a fiber-optic configuration to construct an in situ AFM for operation inside an SEM (attoAFM/SEM) with a laser interferometer ( ).

Techniques: Imaging, Microscopy, Transmission Assay